Features:
High accuracy,excellent repeatability,quick response.
High pressure,better reliability,
Match world standards
Application
Mass Flow Meter accurately measures mass flow
rate,it is widely applied in electrols progress
equipment,vacuum deposition,petrochemical industry,
metallurgy,pharmaceuticalindustry,optical fiber
fusion,analytical & metrical instrument,gas making
and distribution industries.
Calibration:
MFM are calibrated by N2 as a standard gas:
Standard SituationTemperature-0℃(273.15K)
Pressure-101325Pa
Power Input Requirement:
Input Voltage Required+15V,50mA;-15V,50mA
Input and Output Signalfrom 0 to +5VDC
Specification:
Flow Range(equivalent N2) | 0~250SLM | |
Accuracy | ±2%F.S. | |
linearity | ±(0.5~2)%F.S. | |
Repeatability | ±0.2%F.S. | |
Response Time | 10sec | |
Operation Pressure | <0.01MPa | |
Temperature | 5~45℃ | |
Max inlet pressure | 10MPa | |
Leak integrity | 1×10-9SCCSHe | |
Fittings | Swagelok | 6mm 1/4” |
VCR | 1/4” | |
Weight | 1Kg | |
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